Institute for Tech Physics & Materials (MFA)

The Institute for Technical Physics and Materials Science – MTA TTK as a part of the Research Centre for Natural Sciences is a government funded academic institution devoted to interdisciplinary research on complex functional materials and nanometer-scale structures, exploration of physical, chemical and biological principles, their exploitation in integrated micro- and nanosystems, and in the development of characterisation techniques. The infrastructure and the major topics include Si based clean lab, nanopatterning facilities (FIB/ebeam lithography), Auger, transmission electron microscopy, scanning probe techniques, ion implantation, ion beam analysis, optical characterisation, sensorics, preparation and characterisation of carbon and metal-oxidenanostructures. MFA has 125 full time employees, ca. 90 researchers of which over 80 with scientific qualification (Ph.D) among them 16 professors (DSc). MFA puts great emphasis not only on the R&D on unique integrated sensors, but on technology transfer, too. MFA is part of a large network of international and domestic co-operation with academic, industrial and university partners, which supports the application of R&D results. MFA paricipates in large number of EU (FP7, ENIAC) and domestic projects performing mainly fundamental materials research and sensor development.



The MFA MEMS Laboratory ( is involved in development and functional testing solid state sensors and sensor systems (pressure, 3D force, flow, radiation, gas and bio-related transducers), microfluidic and nanofluidic systems, fundamental research sensing principles, novel materials and nanostructures, novel 3D fabrication techniques, ion-solid interaction for supporting MEMS development; and MEMS and related technologies with special emphasis on development of Si MOS embedded circuit. MFA already presented a novel tactile sensing array that processes all three components (normal and shear) of the tactile information at every sensor element (taxel – tactile pixel). MFA’s final goal was to mimic the operation of real biological sensing-processing system with artificial tactile sensors that could be integrated into robotic hands, medical diagnostic devices or even into e.g. arm prostheses to improve their efficiency. The core element of this system is a three-axial force sensing array, to be developed by the MFA MEMS LAB.


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