Okmetic (OKM), Finland
Okmetic is a worldwide market leader in supplying a wide palette of silicon based starting materials for sensor manufacturers. In semiconductor wafers, Okmetic’s speciality is very heavily doped wafers for power semiconductors as well as high resistivity wafers for RF-applications. Products include double side polished wafers, wafers with epitaxial layers (both P/N and very heavily doped layers), Silicon On Insulator (SOI) wafers, C-SOI (SOI wafers with buried cavities), G-SOI (SOI wafers with gettering layer enabling CMOS-sensor integration) and capping wafers. Main customer applications are automotive and industrial control sensors, but wafers are delivered increasingly to consumer applications), too. Sales for 2011 is about 83 M€ and amount of personnel is approximately 360. Okmetic is partner of three Eniac programs: E3Car, Esip and Epamo. In E3Car and Esip TSV´s and engineered SOI-wafers are developed based on traditional approaches using lithography, DRIE-etching, CVD-deposition and planarization.
Okmetic is a pioneer in developing and providing specialty wafers for silicon based MEMS industry since mid-80´s when the industry was born. Since that, Okmetic has gained leading position as a supplier to MEMS industry. Leading inertial and pressure sensor (including microphones) products found in automotive and mobile segments are based on Okmetic supplied materials.